File:8 23 DUV SOI 170C 1.zip
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SOI wafer with matrix array. SEMs are named as E25_F-.15_HGRT, where 'E' stands for the energy in mJ/cm^2 and 'F' for the focus. It appears that the focus needs to be more negative than the current array. More SEMs are needed for conclusive proof.
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| Date/Time | Dimensions | User | Comment | |
|---|---|---|---|---|
| current | 10:20, 23 August 2012 | (1.34 MB) | Jaredhulme (Talk | contribs) | SOI wafer with matrix array. SEMs are named as E25_F-.15_HGRT, where 'E' stands for the energy in mJ/cm^2 and 'F' for the focus. It appears that the focus needs to be more negative than the current array. More SEMs are needed for conclusive proof. |
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