File:8 28 DUV SOI 170C 1.zip
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SOI wafer with matrix array. SEMs are named as E25_F-.15_HGRT, where 'E' stands for the energy in mJ/cm^2 and 'F' for the focus.
Energy 25mJ/cm^2, Focus -.15 seems to be a good configuration.
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| Date/Time | Dimensions | User | Comment | |
|---|---|---|---|---|
| current | 10:46, 28 August 2012 | (1.89 MB) | Jaredhulme (Talk | contribs) | SOI wafer with matrix array. SEMs are named as E25_F-.15_HGRT, where 'E' stands for the energy in mJ/cm^2 and 'F' for the focus. Energy 25mJ/cm^2, Focus -.15 seems to be a good configuration. |
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