File:DBR test gratings & lens.zip
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DBR_test_gratings_&_lens.zip (file size: 40.08 MB, MIME type: application/zip)
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Die 1: 500uC/cm^2 Die 2: 600uC/cm^2 Developed 1:1 MIBK:ISO - 90s Etched 178nm Die 1: Did not etch perfectly for DBR. Dektak marks don't appear to have been sufficiently exposed. Gratings look semi-ok on the waveguides, but not in the trenches. Die 2: Looks better in the trenches. Dektak marks look good. I'm not convinced the duty-cycle is correct, but it's also not terrible. The grating structure is not perfectly smooth but better than Die 1.
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| Date/Time | Dimensions | User | Comment | |
|---|---|---|---|---|
| current | 09:25, 5 August 2013 | (40.08 MB) | Jaredhulme (Talk | contribs) | Die 1: 500uC/cm^2 Die 2: 600uC/cm^2 Developed 1:1 MIBK:ISO - 90s Etched 178nm Die 1: Did not etch perfectly for DBR. Dektak marks don't appear to have been sufficiently exposed. Gratings look semi-ok on the waveguides, but not in the trenches. Die 2: ... |
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