File:Failed contact Litho.zip
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Failed_contact_Litho.zip (file size: 2.95 MB, MIME type: application/zip)
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Contact lithography, post SPR955CM-1.8 develop. Contact metal pad separation is 1um in some places and is getting undercut during the develop. This leads to strings of resist shifting position.
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| Date/Time | Dimensions | User | Comment | |
|---|---|---|---|---|
| current | 09:51, 14 August 2012 | (2.95 MB) | Jaredhulme (Talk | contribs) | Contact lithography, post SPR955CM-1.8 develop. Contact metal pad separation is 1um in some places and is getting undercut during the develop. This leads to strings of resist shifting position. |
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