File:Post5and10minetchsu8.zip
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Post5and10minetchsu8.zip (file size: 1.96 MB, MIME type: application/zip)
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Looks ok but hard to tell if completely gone. I still need to do the last 30 SiN etch. Measurements over large window was 2.51 um with resist, 2.40 um post 5 min etch (resist gone), 2.38 um post another 5 min etch.
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| Date/Time | Dimensions | User | Comment | |
|---|---|---|---|---|
| current | 12:56, 22 August 2012 | (1.96 MB) | Jaredhulme (Talk | contribs) | Looks ok but hard to tell if completely gone. I still need to do the last 30 SiN etch. Measurements over large window was 2.51 um with resist, 2.40 um post 5 min etch (resist gone), 2.38 um post another 5 min etch. |
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