Difference between revisions of "General Mask Info"

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(Mask Template Files)
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* Tips for putting together a mask review ([[media:100309_slotlineB2_mask_order_form.doc|example]])
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== UCSB Stepper ==
 
== UCSB Stepper ==
 
* Standard UCSB stepper frame has a maximum open field of 16mm square.
 
* Standard UCSB stepper frame has a maximum open field of 16mm square.

Revision as of 19:38, 16 May 2011

  • Tips for putting together a mask review (example)

UCSB Stepper

  • Standard UCSB stepper frame has a maximum open field of 16mm square.
  • In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
  • If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate.
  • After you finish your mask, please reference "mask order" to prepare the mask files to the vendors.


Mask Template Files

Number Description Mask file Instruction Date Created by Note
1 Template for 7.8mm square die with DFAS alignment marks 7.8mm square template, alternative file APR 02, 2010 Hui-Wen  
2 Stepper alignment marks only Alignment marks   MAR 17, 2011 Molly  

Test structures

  • Please contribute common test structures that you think might be useful to everyone.


Test structures Ledit files
Number Description Mask file Instruction Date Created by Note
1 Passive Cut back Passive WG spiral   APR 02, 2010 Hui-Wen