Difference between revisions of "General Mask Info"
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− | * Tips for putting together a mask review [[ | + | * Tips for putting together a mask review [[media:Mask_review.docx|Mask review]] |
Revision as of 20:10, 16 May 2011
- Tips for putting together a mask review Mask review
UCSB Stepper
- Standard UCSB stepper frame has a maximum open field of 16mm square.
- In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
- If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate.
- After you finish your mask, please reference "mask order" to prepare the mask files to the vendors.
Mask Template Files
Number | Description | Mask file | Instruction | Date | Created by | Note |
---|---|---|---|---|---|---|
1 | Template for 7.8mm square die with DFAS alignment marks | 7.8mm square template, alternative | file | APR 02, 2010 | Hui-Wen | |
2 | Stepper alignment marks only | Alignment marks | MAR 17, 2011 | Molly |
Test structures
- Please contribute common test structures that you think might be useful to everyone.
Number | Description | Mask file | Instruction | Date | Created by | Note |
---|---|---|---|---|---|---|
1 | Passive Cut back | Passive WG spiral | APR 02, 2010 | Hui-Wen |