Difference between revisions of "General Mask Info"
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| − | + | * Tips for putting together a mask review : [[media:Mask_review.docx|Mask review]] | |
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| + | == UCSB Stepper == | ||
* Standard UCSB stepper frame has a maximum open field of 16mm square. | * Standard UCSB stepper frame has a maximum open field of 16mm square. | ||
* In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate. | * In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate. | ||
* If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate. | * If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate. | ||
* After you finish your mask, please reference "[[Mask_Order|mask order]]" to prepare the mask files to the vendors. | * After you finish your mask, please reference "[[Mask_Order|mask order]]" to prepare the mask files to the vendors. | ||
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| + | == Mask Template Files == | ||
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{| border="3" | {| border="3" | ||
|- style="background:green; color:white" | |- style="background:green; color:white" | ||
! Number !! Description !! Mask file !! Instruction !! Date !! Created by !! Note | ! Number !! Description !! Mask file !! Instruction !! Date !! Created by !! Note | ||
|- | |- | ||
| − | | 1 || Template for 7.8mm square die with DFAS alignment marks ||[[media: | + | | 1 || Template for 7.8mm square die with DFAS alignment marks ||[[media:Mask_template_7.8mm_square.tdb|7.8mm square template]], [[media:UCSB_stepper_frame.tdb|alternative]] ||[[media:Mask_Template_Instruction.ppt|file]] || APR 02, 2010 || Hui-Wen || |
| + | |- | ||
| + | | 2 || Stepper alignment marks only ||[[media:Stepper_alignuse.gds|Alignment marks]] || || MAR 17, 2011 || Molly || | ||
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|} | |} | ||
| + | == Test structures == | ||
| + | * Please contribute common test structures that you think might be useful to everyone. | ||
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{| border="3" | {| border="3" | ||
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| + | [[File:Example.jpg]] | ||
Latest revision as of 19:27, 17 May 2011
- Tips for putting together a mask review : Mask review
UCSB Stepper[edit]
- Standard UCSB stepper frame has a maximum open field of 16mm square.
- In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
- If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate.
- After you finish your mask, please reference "mask order" to prepare the mask files to the vendors.
Mask Template Files[edit]
| Number | Description | Mask file | Instruction | Date | Created by | Note |
|---|---|---|---|---|---|---|
| 1 | Template for 7.8mm square die with DFAS alignment marks | 7.8mm square template, alternative | file | APR 02, 2010 | Hui-Wen | |
| 2 | Stepper alignment marks only | Alignment marks | MAR 17, 2011 | Molly |
Test structures[edit]
- Please contribute common test structures that you think might be useful to everyone.
| Number | Description | Mask file | Instruction | Date | Created by | Note |
|---|---|---|---|---|---|---|
| 1 | Passive Cut back | Passive WG spiral | APR 02, 2010 | Hui-Wen |
