Difference between revisions of "General Mask Info"
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+ | * Tips for putting together a mask review : [[media:Mask_review.docx|Mask review]] | ||
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== UCSB Stepper == | == UCSB Stepper == | ||
* Standard UCSB stepper frame has a maximum open field of 16mm square. | * Standard UCSB stepper frame has a maximum open field of 16mm square. | ||
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! Number !! Description !! Mask file !! Instruction !! Date !! Created by !! Note | ! Number !! Description !! Mask file !! Instruction !! Date !! Created by !! Note | ||
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− | | 1 || Template for 7.8mm square die with DFAS alignment marks ||[[media:Mask_template_7.8mm_square.tdb|7.8mm square template]] ||[[media:Mask_Template_Instruction.ppt|file]] || APR 02, 2010 || Hui-Wen || | + | | 1 || Template for 7.8mm square die with DFAS alignment marks ||[[media:Mask_template_7.8mm_square.tdb|7.8mm square template]], [[media:UCSB_stepper_frame.tdb|alternative]] ||[[media:Mask_Template_Instruction.ppt|file]] || APR 02, 2010 || Hui-Wen || |
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+ | | 2 || Stepper alignment marks only ||[[media:Stepper_alignuse.gds|Alignment marks]] || || MAR 17, 2011 || Molly || | ||
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== Test structures == | == Test structures == | ||
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− | + | [[File:Example.jpg]] | |
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Latest revision as of 19:27, 17 May 2011
- Tips for putting together a mask review : Mask review
UCSB Stepper[edit]
- Standard UCSB stepper frame has a maximum open field of 16mm square.
- In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
- If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate.
- After you finish your mask, please reference "mask order" to prepare the mask files to the vendors.
Mask Template Files[edit]
Number | Description | Mask file | Instruction | Date | Created by | Note |
---|---|---|---|---|---|---|
1 | Template for 7.8mm square die with DFAS alignment marks | 7.8mm square template, alternative | file | APR 02, 2010 | Hui-Wen | |
2 | Stepper alignment marks only | Alignment marks | MAR 17, 2011 | Molly |
Test structures[edit]
- Please contribute common test structures that you think might be useful to everyone.
Number | Description | Mask file | Instruction | Date | Created by | Note |
---|---|---|---|---|---|---|
1 | Passive Cut back | Passive WG spiral | APR 02, 2010 | Hui-Wen |