Difference between revisions of "DUV Stepper"
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[[Media:DUV_Lithography_Test_on_Si.rar]] | [[Media:DUV_Lithography_Test_on_Si.rar]] | ||
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SEMs - Dies 19-28: [[File:180c_8_4_12.zip]] | SEMs - Dies 19-28: [[File:180c_8_4_12.zip]] | ||
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| + | SEMs - Dies 25-29: [[File:180c_8_6_12.zip]] | ||
Revision as of 12:50, 14 August 2012
Media:DUV_Lithography_Test_on_Si.rar
160C Bake
SEMs - Dies 21-24: File:SEM Gratings 8 1 12.zip
Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
SEMs - Dies 24-27: File:170c 8 4 12.zip
180C Bake
SEMs - Dies 19-28: File:180c 8 4 12.zip
SEMs - Dies 25-29: File:180c 8 6 12.zip
