Difference between revisions of "DUV Stepper"
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Jaredhulme (Talk | contribs) |
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===160C Bake=== | ===160C Bake=== | ||
| − | SEMs - Dies | + | SEMs - Dies 26-29: [[File:160c_8_6_12.zip]] |
Microscope Pics - After 20 min Nanostrip: [[File:Post_20min_NanoStrip_8_10_12.zip]] | Microscope Pics - After 20 min Nanostrip: [[File:Post_20min_NanoStrip_8_10_12.zip]] | ||
Revision as of 12:51, 14 August 2012
Media:DUV_Lithography_Test_on_Si.rar
160C Bake
SEMs - Dies 26-29: File:160c 8 6 12.zip
Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
SEMs - Dies 24-27: File:170c 8 4 12.zip
180C Bake
SEMs - Dies 19-28: File:180c 8 4 12.zip
SEMs - Dies 25-29: File:180c 8 6 12.zip
