Difference between revisions of "DUV Stepper"
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[https://docs.google.com/spreadsheet/ccc?key=0Ai_MTssdIAw_dHY4OWRCNjY0V1MzNnFXamhVZWptN3c#gid=0 Process Follower] Google Doc | [https://docs.google.com/spreadsheet/ccc?key=0Ai_MTssdIAw_dHY4OWRCNjY0V1MzNnFXamhVZWptN3c#gid=0 Process Follower] Google Doc | ||
Revision as of 11:55, 15 August 2012
Characterization
Process Follower Google Doc
160C Bake
SEMs - Dies 26-29: File:160c 8 6 12.zip
Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
SEMs - Dies 24-27: File:170c 8 4 12.zip
180C Bake
SEMs - Dies 19-28: File:180c 8 4 12.zip
SEMs - Dies 25-29: File:180c 8 6 12.zip
The following page links to this page:
Equipment - tools
