Difference between revisions of "Cleanroom Equipment"

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* Bowers-specific processes
 
* Bowers-specific processes
 
* Remarks, results, optimization runs
 
* Remarks, results, optimization runs
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 +
== Tools ==
  
 
 [[Ebeam4]]  
 
 [[Ebeam4]]  

Revision as of 12:03, 15 August 2012

  • List of tools, manuals, links to NanoFab
  • Bowers-specific processes
  • Remarks, results, optimization runs

Tools

 Ebeam4  

 Deep RIE Bosch Etcher  

 DUV Stepper  

 Spin-Rinse-Dry