Difference between revisions of "Cleanroom Equipment"

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(Tools)
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 [[DUV Stepper]]  
 
 [[DUV Stepper]]  
 +
 +
 [[ICP 2]]  
  
 
 [[Spin-Rinse-Dry]]  
 
 [[Spin-Rinse-Dry]]  

Revision as of 15:32, 12 February 2013

  • List of tools, manuals, links to NanoFab
  • Bowers-specific processes
  • Remarks, results, optimization runs

Tools

 Ebeam4  

 Deep RIE Bosch Etcher  

 DUV Stepper  

 ICP 2  

 Spin-Rinse-Dry