Difference between revisions of "E-Beam Lithography (EBL)"
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* [[media:Proximity Effect Correction for Electron Beam Lithography2.ppt|Proximity Effect Correction Experiment Updated]] | * [[media:Proximity Effect Correction for Electron Beam Lithography2.ppt|Proximity Effect Correction Experiment Updated]] | ||
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* [[Proximity Correction PPT Past Versions]] | * [[Proximity Correction PPT Past Versions]] | ||
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+ | === SEMs | ||
+ | ** SEMs - 1st Chips - Pure ZEP dosage array: [[file:Pure ZEP SEMs.zip]]<BR> | ||
+ | ** SEMs - 1st Chips - 2:1 ZEP dosage array: [[file:2_to_1 ZEP SEMs.zip]]<BR> | ||
+ | ** SEMs - 2nd Chips - Pure ZEP dosage array: [[file:2ndChips_Pure Zep-EBL Correction_3_22_13.zip]]<BR> | ||
+ | ** SEMs - 2nd Chips - 2:1 ZEP dosage array: [[file:2ndChips_2_to_1 ZEP SEMs.zip]]<BR> | ||
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Revision as of 16:26, 25 March 2013
Proximity Correction
=== SEMs
- SEMs - 1st Chips - Pure ZEP dosage array: File:Pure ZEP SEMs.zip
- SEMs - 1st Chips - 2:1 ZEP dosage array: File:2 to 1 ZEP SEMs.zip
- SEMs - 2nd Chips - Pure ZEP dosage array: File:2ndChips Pure Zep-EBL Correction 3 22 13.zip
- SEMs - 2nd Chips - 2:1 ZEP dosage array: File:2ndChips 2 to 1 ZEP SEMs.zip
- SEMs - 1st Chips - Pure ZEP dosage array: File:Pure ZEP SEMs.zip
login to BEAMER server:
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p:femto
Run a monte carlo simulation of the "substrate" and resist you are using in MC^3.
For example: ZEP(2k) on 500nm SOI with 1um BOx.
1) Use the drop down tab to select PENELOPE.
2) Build your layer stack in the PELELOPE GUI. z-Resolution must be an integer multiple of the thickness.
3) Check Save the result for the resist layer, for this example we have saved the "ZEP520_" layer
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