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| | * Remarks, results, optimization runs | | * Remarks, results, optimization runs |
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| − | == Ebeam4 == | + | == Tools == |
| − | * Very smooth sidewall profile
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| − | * Great sidewall coverage if two directional rotation is used
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| − | * Tool notes
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| − | ** Pumping down around 1 hr
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| − | ** Use group source
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| − | * Check [[media:100520_Ebeam4 Probe Metal Deposition.ppt|Deposit Report]] for images using two different orientation for deposition
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| − | [[Spin-Rinse-Dry (SRD) - Bay #7]]
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| − | == Deep RIE (Bosch Etcher) ==
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| − | Restart instructions:
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| − | Note:You may have to wait for the temperature to stabilize between some of these steps.
| + | [[AutoStep 200]] |
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| − | 1) Restart computer
| + | [[Deep RIE Bosch Etcher]] |
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| − | 2) Log in info (only required when restarting) Username: 3333, Password: 3333
| + | [[DUV Stepper]] |
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| − | 3) Click the "ON" button (in the bottom left)
| + | [[Ebeam4]] |
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| − | 4) Utilities->Turbo Pump ON
| + | [[E-Beam Lithography (EBL)]] |
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| − | 5) Click "Standby" button (again in bottom left)
| + | [[ICP 2]] |
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| − | 6) Service->Maintenance->Pump->System (Turbo Pump)
| + | [[Spin-Rinse-Dry]] |
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| − | 7) Process->Batch...File->Load...Select a batch file to load, then close window
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| − | 8) Click "Ready" button (again in bottom left)
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| − | 9) Windows->Overview Diagram...and...You should be ready to go.
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| − | == DUV STEPPER - Bay 7==
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| − | Current - DUV Stepper Waveguides: [[Media:DUV_Stepper_Waveguides_Development.pptx]]
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| − | DUV Stepper Waveguides Update: [[Media:DUV Stepper Waveguides_2.pptx]]
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| − | DUV Stepper Waveguides Update: [[Media:DUV Stepper Waveguides_1.pptx]]
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| − | | + | |
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| − | Additional files for
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| − | [[DUV Lithography Characterization]] | + | |
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| − | == Spin-Rinse-Dry ==
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| − | 1) Load wafers facing the back of the chamber.
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| − | 2) Press "Power" button.
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| − | 3) Turn switch to "Hand". (Switch is located behind the tool)
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| − | 4) Turn on water valve so the handle is vertical and in line with the pipe.
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| − | (Valve is located behind the tool)
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| − | 5) Press "Start" button (Green button below the power button). Make sure you see water spraying.
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| − | 6) Wait until dry cycle begins.
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| − | 7) Turn switch back to "Auto".
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| − | 8) Turn water valve off.
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| − | 9) Remove samples when finished.
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| − | 10) Press "Power" button.
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