Difference between revisions of "Mask Order"
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(→DUV Stepper Masks) |
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==DUV Stepper Masks== | ==DUV Stepper Masks== | ||
− | The DUV Stepper alignment mark may be something you put on i-line stepper masks if you plan to do pieces. | + | The DUV Stepper alignment mark may be something you put on [[media:ASML_Alignment_Mark.gds|i-line stepper masks]] if you plan to do pieces. |
− | TOPPAN is our vendor for DUV Stepper masks. Use this [[media:UCSB_MOF.doc|order form]] based on this [[UCSB_quotation_101410.doc|quote's]] "product code". Here's a [[EXAMPLE_DUV_Mask.pdf|PO template]]. | + | TOPPAN is our vendor for DUV Stepper masks. Use this [[media:UCSB_MOF.doc|order form]] based on this [[media:UCSB_quotation_101410.doc|quote's]] "product code". Here's a [[media:EXAMPLE_DUV_Mask.pdf|PO template]]. |
Frame is 22x26mm(X,Y) and you do not rotate the mask. High resolution items should be inside the 21x21 | Frame is 22x26mm(X,Y) and you do not rotate the mask. High resolution items should be inside the 21x21 |
Revision as of 17:09, 27 April 2012
Some things you might need to know
- UCSB standard stepper frame
- Important! Read the instructions before you start.
- This Ledit file includes frames for 1, 2 and 4 fields on a single plate. You do not need to place each layer in this file, but it will be a good visual display for each layer when you try to put in coordinates for each layer.
- Mask vendor: Photronics. Please contact Grace Law (glaw@photronics.com) for mask order.
- Specification of the masks.
Necessary files for mask order
- GDS file for each layer
- Instructions for the placement and coordinates for each layer on the mask plate (example)
- You can specify spec. of the mask, position of each layer, and polarity here.
- A note on polarity: If a layer is specified as "negative," what you have digitized is clear on the mask. If the layer is "positive," what you have digitized would be dark on the mask.
- You can specify spec. of the mask, position of each layer, and polarity here.
- Mask order form (example)
DUV Stepper Masks
The DUV Stepper alignment mark may be something you put on i-line stepper masks if you plan to do pieces.
TOPPAN is our vendor for DUV Stepper masks. Use this order form based on this quote's "product code". Here's a PO template.
Frame is 22x26mm(X,Y) and you do not rotate the mask. High resolution items should be inside the 21x21