Difference between revisions of "General Mask Info"
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* Standard UCSB stepper frame has a maximum open field of 16mm square. | * Standard UCSB stepper frame has a maximum open field of 16mm square. | ||
* In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate. | * In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate. | ||
| − | * If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate | + | * If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate. |
| − | * After you finish your mask, please reference "[[Mask_Order|mask order]]" to prepare the mask files to the vendors | + | * After you finish your mask, please reference "[[Mask_Order|mask order]]" to prepare the mask files to the vendors. |
| − | + | . | |
'''Mask Template Files''' | '''Mask Template Files''' | ||
{| border="3" | {| border="3" | ||
Revision as of 18:33, 2 April 2010
UCSB Stepper Frame
- Standard UCSB stepper frame has a maximum open field of 16mm square.
- In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
- If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate.
- After you finish your mask, please reference "mask order" to prepare the mask files to the vendors.
. Mask Template Files
| Number | Description | Mask file | Instruction | Date | Created by | Note |
|---|---|---|---|---|---|---|
| 1 | Template for 7.8mm square die with DFAS alignment marks | 7.8mm square template | instruction_7.8mm square | APR 02, 2010 | Hui-Wen |
Test structures
| Number | Description | Mask file | Instruction | Date | Created by | Note |
|---|---|---|---|---|---|---|
| 1 | Passive Cut back | 7.8mm square template | instruction_7.8mm square | APR 02, 2010 | Hui-Wen |
