Difference between revisions of "General Mask Info"

Revision as of 18:35, 3 April 2010

UCSB Stepper Frame

Standard UCSB stepper frame has a maximum open field of 16mm square.
In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate.
After you finish your mask, please reference "mask order" to prepare the mask files to the vendors.

. Mask Template Files

Number	Description	Mask file	Instruction	Date	Created by	Note
1	Template for 7.8mm square die with DFAS alignment marks	7.8mm square template	template instruction	APR 02, 2010	Hui-Wen

Test structures

**Test structures Ledit files**
Number	Description	Mask file	Instruction	Date	Created by	Note
1	Passive Cut back	Passive WG spiral		APR 02, 2010	Hui-Wen

@@ Line 10: / Line 10: @@
 ! Number !! Description !! Mask file !! Instruction !! Date !! Created by !! Note
 |-
-| 1 || Template for 7.8mm square die with DFAS alignment marks ||[[media:Mask template_7.8mm square.tdb|7.8mm square template]] ||[[media:instruction.doc|instruction_7.8mm square]] || APR 02, 2010 || Hui-Wen || &nbsp;
+| 1 || Template for 7.8mm square die with DFAS alignment marks ||[[media:Mask template_7.8mm square.tdb|7.8mm square template]] ||[[media:Mask_Template_Instruction.ppt‎|template instruction]] || APR 02, 2010 || Hui-Wen || &nbsp;
 |-
 |}