Difference between revisions of "General Mask Info"
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* Please contribute common test structures that you think might be useful to everyone. | * Please contribute common test structures that you think might be useful to everyone. | ||
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Revision as of 10:45, 6 April 2010
UCSB Stepper Frame
- Standard UCSB stepper frame has a maximum open field of 16mm square.
- In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
- If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate.
- After you finish your mask, please reference "mask order" to prepare the mask files to the vendors.
Mask Template Files
| Number | Description | Mask file | Instruction | Date | Created by | Note |
|---|---|---|---|---|---|---|
| 1 | Template for 7.8mm square die with DFAS alignment marks | 7.8mm square template | file | APR 02, 2010 | Hui-Wen |
Test structures
- Please contribute common test structures that you think might be useful to everyone.
| Number | Description | Mask file | Instruction | Date | Created by | Note |
|---|---|---|---|---|---|---|
| 1 | Passive Cut back | Passive WG spiral | APR 02, 2010 | Hui-Wen |
