Difference between revisions of "General Mask Info"
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| 1 || Template for 7.8mm square die with DFAS alignment marks ||[[media:Mask_template_7.8mm_square.tdb|7.8mm square template]] ||[[media:Mask_Template_Instruction.ppt|file]] || APR 02, 2010 || Hui-Wen || | | 1 || Template for 7.8mm square die with DFAS alignment marks ||[[media:Mask_template_7.8mm_square.tdb|7.8mm square template]] ||[[media:Mask_Template_Instruction.ppt|file]] || APR 02, 2010 || Hui-Wen || | ||
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| + | | 2 || Stepper alignment marks only ||[[media:Stepper_alignuse.gds|Alignment marks]] || || MAR 17, 2011 || Molly || | ||
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== Test structures == | == Test structures == | ||
Revision as of 14:30, 17 March 2011
UCSB Stepper
- Standard UCSB stepper frame has a maximum open field of 16mm square.
- In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
- If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate.
- After you finish your mask, please reference "mask order" to prepare the mask files to the vendors.
Mask Template Files
| Number | Description | Mask file | Instruction | Date | Created by | Note |
|---|---|---|---|---|---|---|
| 1 | Template for 7.8mm square die with DFAS alignment marks | 7.8mm square template | file | APR 02, 2010 | Hui-Wen | |
| 2 | Stepper alignment marks only | Alignment marks | MAR 17, 2011 | Molly |
Test structures
- Please contribute common test structures that you think might be useful to everyone.
| Number | Description | Mask file | Instruction | Date | Created by | Note |
|---|---|---|---|---|---|---|
| 1 | Passive Cut back | Passive WG spiral | APR 02, 2010 | Hui-Wen |
