Difference between revisions of "Cleanroom Equipment"
From OptoelectronicsWiki
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** Use group source | ** Use group source | ||
* Check [[media:100520_Ebeam4 Probe Metal Deposition.ppt|Deposit Report]] for images using two different orientation for deposition | * Check [[media:100520_Ebeam4 Probe Metal Deposition.ppt|Deposit Report]] for images using two different orientation for deposition | ||
| + | |||
| + | === Deep RIE (Bosch Etcher) === | ||
| + | Restart instructions: | ||
| + | |||
| + | Note:You may have to wait for the temperature to stabilize between some of these steps. | ||
| + | |||
| + | 1) Restart computer | ||
| + | |||
| + | 2) Log in info (only required when restarting) Username: 3333, Password: 3333 | ||
| + | |||
| + | 3) Click the "ON" button (in the bottom left) | ||
| + | |||
| + | 4) Utilities->Turbo Pump ON | ||
| + | |||
| + | 5) Click "Standby" button (again in bottom left) | ||
| + | |||
| + | 6) Service->Maintenance->Pump->System (Turbo Pump) | ||
| + | |||
| + | 7) Process->Batch...File->Load...Select a batch file to load, then close window | ||
| + | |||
| + | 8) Click "Ready" button (again in bottom left) | ||
| + | |||
| + | 9) You should be ready to go. | ||
Revision as of 18:57, 7 May 2012
- List of tools, manuals, links to NanoFab
- Bowers-specific processes
- Remarks, results, optimization runs
Ebeam4
- Very smooth sidewall profile
- Great sidewall coverage if two directional rotation is used
- Tool notes
- Pumping down around 1 hr
- Use group source
- Check Deposit Report for images using two different orientation for deposition
Deep RIE (Bosch Etcher)
Restart instructions:
Note:You may have to wait for the temperature to stabilize between some of these steps.
1) Restart computer
2) Log in info (only required when restarting) Username: 3333, Password: 3333
3) Click the "ON" button (in the bottom left)
4) Utilities->Turbo Pump ON
5) Click "Standby" button (again in bottom left)
6) Service->Maintenance->Pump->System (Turbo Pump)
7) Process->Batch...File->Load...Select a batch file to load, then close window
8) Click "Ready" button (again in bottom left)
9) You should be ready to go.
