Difference between revisions of "General Mask Info"

Revision as of 20:02, 16 May 2011

Standard UCSB stepper frame has a maximum open field of 16mm square.
In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate.
After you finish your mask, please reference "mask order" to prepare the mask files to the vendors.

Number	Description	Mask file	Instruction	Date	Created by	Note
1	Template for 7.8mm square die with DFAS alignment marks	7.8mm square template, alternative	file	APR 02, 2010	Hui-Wen
2	Stepper alignment marks only	Alignment marks		MAR 17, 2011	Molly

Please contribute common test structures that you think might be useful to everyone.

**Test structures Ledit files**
Number	Description	Mask file	Instruction	Date	Created by	Note
1	Passive Cut back	Passive WG spiral		APR 02, 2010	Hui-Wen

Revision as of 19:52, 16 May 2011 (edit) Siddharth (Talk \| contribs) m ← Older edit		Revision as of 20:02, 16 May 2011 (edit) (undo) Siddharth (Talk \| contribs) Newer edit →
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−	* Tips for putting together a mask review ([[Media:~~[[File:Recommended_procedure_to_organize_a_mask_review~~.~~docx ]]~~]]	+	* Tips for putting together a mask review [[Media:Mask_revieiew.docx‎]]
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	== UCSB Stepper ==		== UCSB Stepper ==