Difference between revisions of "Chips Table"
From OptoelectronicsWiki
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| SOIBuffer2R 1 || || || || || || || | | SOIBuffer2R 1 || || || || || || || | ||
|- | |- | ||
− | | SOIBuffer2R 2 || || || || || || || | + | | SOIBuffer2R 2 || || || || || || || Grass during mesa etch. New batch started. |
|- | |- | ||
| SOIBuffer2R 3 || || || || || || || | | SOIBuffer2R 3 || || || || || || || |
Revision as of 16:23, 2 March 2010
Run ID | wafer | mask | process flow | process follower | operator | logbook | results |
---|---|---|---|---|---|---|---|
SOIBuffer2R 1 | |||||||
SOIBuffer2R 2 | Grass during mesa etch. New batch started. | ||||||
SOIBuffer2R 3 |