Difference between revisions of "Date"
From OptoelectronicsWiki
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|+ '''Hybrid Silicon Process''' | |+ '''Hybrid Silicon Process''' | ||
|- style="background:red; color:white" | |- style="background:red; color:white" | ||
| − | ! Date!! Issue or Defect !! Link | + | ! Date!! Issue or Defect !! Link |
| + | |||
| + | |- | ||
| + | | [[Mar 16/2012]] || HF etching protection, Mesa Litho stripping || || | ||
|- | |- | ||
| [[Mar 01/2012]] || Bonding, Resist coverage, HF wicking, Patterns under EPI || || | | [[Mar 01/2012]] || Bonding, Resist coverage, HF wicking, Patterns under EPI || || | ||
Revision as of 10:08, 16 March 2012
Process Issues and Defects
| Date | Issue or Defect | Link | |
|---|---|---|---|
| Mar 16/2012 | HF etching protection, Mesa Litho stripping | ||
| Mar 01/2012 | Bonding, Resist coverage, HF wicking, Patterns under EPI | ||
| Feb 29/2012 | Bonding |
