Difference between revisions of "Process Hybrid Silicon"
From OptoelectronicsWiki
| Line 4: | Line 4: | ||
! Process ID !! Version !! Process flow !! Process follower !! Description | ! Process ID !! Version !! Process flow !! Process follower !! Description | ||
|- | |- | ||
| − | | SP-PWD || | + | | SP-PWD || # [[media:WG.xlsx | Si WG etch]] || || || Single etch-step SOI process; passive components |
|- | |- | ||
| HSP-SOA || || || || Hybrid silicon with SOAs | | HSP-SOA || || || || Hybrid silicon with SOAs | ||
Revision as of 14:22, 10 March 2010
| Process ID | Version | Process flow | Process follower | Description |
|---|---|---|---|---|
| SP-PWD | # Si WG etch | Single etch-step SOI process; passive components | ||
| HSP-SOA | Hybrid silicon with SOAs | |||
| HSP-MOD | Hybrid silicon with modulators | |||
| HSP-DET | Hybrid silicon with detectors | |||
| HSP-SOA-DET | Hybrid silicon with SOAs and detectors | |||
| HSP-SOA-DET-MOD | Hybrid silicon with SOAs, detectors and modulators |
