Difference between revisions of "DUV Stepper"
From OptoelectronicsWiki
Jaredhulme (Talk | contribs) (Created page with " ===160C Bake=== SEMs - Dies 21-24: File:SEM_Gratings_8_1_12.zip Microscope Pics - After 20 min Nanostrip: File:Post_20min_NanoStrip_8_10_12.zip ===170C Bake=== ===18...") |
Jaredhulme (Talk | contribs) |
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| + | [[Media:DUV_Lithography_Test_on_Si.rar]] | ||
===160C Bake=== | ===160C Bake=== | ||
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===170C Bake=== | ===170C Bake=== | ||
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| + | SEMs - Dies 24-27: [[File:170c_8_4_12.zip]] | ||
===180C Bake=== | ===180C Bake=== | ||
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| + | SEMs - Dies 19-28: [[File:180c_8_4_12.zip]] | ||
Revision as of 12:46, 14 August 2012
Media:DUV_Lithography_Test_on_Si.rar
160C Bake
SEMs - Dies 21-24: File:SEM Gratings 8 1 12.zip
Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
SEMs - Dies 24-27: File:170c 8 4 12.zip
180C Bake
SEMs - Dies 19-28: File:180c 8 4 12.zip
