Difference between revisions of "Deep RIE Bosch Etcher"
From OptoelectronicsWiki
Jaredhulme (Talk | contribs) (Created page with "== Restart instructions == Note:You may have to wait for the temperature to stabilize between some of these steps. 1) Restart computer 2) Log in info (only required when resta...") |
Jaredhulme (Talk | contribs) (→Restart instructions) |
||
Line 21: | Line 21: | ||
9) Windows->Overview Diagram...and...You should be ready to go. | 9) Windows->Overview Diagram...and...You should be ready to go. | ||
− | Return to | + | |
+ | Return to [[Cleanroom_Equipment]] |
Latest revision as of 11:52, 15 August 2012
Restart instructions[edit]
Note:You may have to wait for the temperature to stabilize between some of these steps.
1) Restart computer
2) Log in info (only required when restarting) Username: 3333, Password: 3333
3) Click the "ON" button (in the bottom left)
4) Utilities->Turbo Pump ON
5) Click "Standby" button (again in bottom left)
6) Service->Maintenance->Pump->System (Turbo Pump)
7) Process->Batch...File->Load...Select a batch file to load, then close window
8) Click "Ready" button (again in bottom left)
9) Windows->Overview Diagram...and...You should be ready to go.
Return to Cleanroom_Equipment