Difference between revisions of "Cleanroom Equipment"

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(Tools)
(Tools)
 
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 [[AutoStep 200]]  
  
 
 [[Deep RIE Bosch Etcher]]  
 
 [[Deep RIE Bosch Etcher]]  

Latest revision as of 12:33, 18 April 2013

  • List of tools, manuals, links to NanoFab
  • Bowers-specific processes
  • Remarks, results, optimization runs

Tools[edit]

 AutoStep 200  

 Deep RIE Bosch Etcher  

 DUV Stepper  

 Ebeam4  

 E-Beam Lithography (EBL)  

 ICP 2  

 Spin-Rinse-Dry