Difference between revisions of "Mask Order"

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'''Something you need to know about the mask order'''
+
'''Something you might need to know'''
 
* Mask vendor: Photronics. Please contact Grace Law (glaw@photronics.com) for mask order.
 
* Mask vendor: Photronics. Please contact Grace Law (glaw@photronics.com) for mask order.
 
* [[QUOTE_UCSB25940-BH-05L_(08-08-10).xls|Specification of the masks]].
 
* [[QUOTE_UCSB25940-BH-05L_(08-08-10).xls|Specification of the masks]].

Revision as of 12:04, 6 April 2010

Necessary files for mask order

  • GDS file for each layer
  • Instruction for the placement and coordinates for each layer on the mask plate (example)
    • You can specify spec. of the mask, position of each layer, and polarity here.
  • Mask order form (example)


Something you might need to know

  • Mask vendor: Photronics. Please contact Grace Law (glaw@photronics.com) for mask order.
  • Specification of the masks.
  • UCSB standard stepper frame
    • This frame includes frames for 1, 2 and 4 fields on a single plate.
    • Instruction will explain more about the layout position of each layer.