Difference between revisions of "Process Hybrid Silicon"
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(Created page with '{| border="3" |+ '''Silicon process overview''' |- style="background:red; color:white" ! Process ID !! Version !! Process flow !! Process follower !! Description |- | SP-PWD ||…') |
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| SP-PWD || || || || Single etch-step SOI process; passive components | | SP-PWD || || || || Single etch-step SOI process; passive components | ||
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| − | | HSP-SOA || || || Hybrid silicon with SOAs | + | | HSP-SOA || || || || Hybrid silicon with SOAs |
|- | |- | ||
| − | | HSP-MOD || || || Hybrid silicon with modulators | + | | HSP-MOD || || || || Hybrid silicon with modulators |
|- | |- | ||
| − | | HSP-DET || || || Hybrid silicon with detectors | + | | HSP-DET || || || || Hybrid silicon with detectors |
|- | |- | ||
| − | | HSP-SOA-DET || || || Hybrid silicon with SOAs and detectors | + | | HSP-SOA-DET || || || || Hybrid silicon with SOAs and detectors |
|- | |- | ||
| − | | HSP-SOA-DET-MOD || || || Hybrid silicon with SOAs, detectors and modulators | + | | HSP-SOA-DET-MOD || || || || Hybrid silicon with SOAs, detectors and modulators |
|- | |- | ||
|} | |} | ||
Revision as of 21:28, 16 February 2010
| Process ID | Version | Process flow | Process follower | Description |
|---|---|---|---|---|
| SP-PWD | Single etch-step SOI process; passive components | |||
| HSP-SOA | Hybrid silicon with SOAs | |||
| HSP-MOD | Hybrid silicon with modulators | |||
| HSP-DET | Hybrid silicon with detectors | |||
| HSP-SOA-DET | Hybrid silicon with SOAs and detectors | |||
| HSP-SOA-DET-MOD | Hybrid silicon with SOAs, detectors and modulators |
