Mask Order

Some things you might need to know

• UCSB standard stepper frame
  • Important! Read the instructions before you start.
  • This Ledit file includes frames for 1, 2 and 4 fields on a single plate. You do not need to place each layer in this file, but it will be a good visual display for each layer when you try to put in coordinates for each layer.
• Mask vendor: Photronics. Please contact Grace Law (glaw@photronics.com) for mask order.
• Specification of the masks.

Necessary files for mask order

• GDS file for each layer
• Instructions for the placement and coordinates for each layer on the mask plate (example)
  • You can specify spec. of the mask, position of each layer, and polarity here.
    • A note on polarity: If a layer is specified as "negative," what you have digitized is clear on the mask. If the layer is "positive," what you have digitized would be dark on the mask.
• Mask order form (example)

DUV Stepper Masks

The DUV Stepper alignment mark may be something you put on i-line stepper masks if you plan to do pieces.

TOPPAN is our vendor for DUV Stepper masks. Use this order form based on this quote's "product code". Here's a PO template.

Frame is 22x26mm(X,Y) and you do not rotate the mask. High resolution items should be inside the 21x21