Cleanroom Equipment

• List of tools, manuals, links to NanoFab
• Bowers-specific processes
• Remarks, results, optimization runs

Ebeam4

• Very smooth sidewall profile
• Great sidewall coverage if two directional rotation is used
• Tool notes
  • Pumping down around 1 hr
  • Use group source
• Check Deposit Report for images using two different orientation for deposition

Deep RIE (Bosch Etcher)

Restart instructions:

Note:You may have to wait for the temperature to stabilize between some of these steps.

1) Restart computer

2) Log in info (only required when restarting) Username: 3333, Password: 3333

3) Click the "ON" button (in the bottom left)

4) Utilities->Turbo Pump ON

5) Click "Standby" button (again in bottom left)

6) Service->Maintenance->Pump->System (Turbo Pump)

7) Process->Batch...File->Load...Select a batch file to load, then close window

8) Click "Ready" button (again in bottom left)

9) Wondows->Overview Diagram...and...You should be ready to go.