Cleanroom Equipment

From OptoelectronicsWiki
Revision as of 12:33, 18 April 2013 by Jaredhulme (Talk | contribs)

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to: navigation, search
  • List of tools, manuals, links to NanoFab
  • Bowers-specific processes
  • Remarks, results, optimization runs

Tools

 AutoStep 200  

 Deep RIE Bosch Etcher  

 DUV Stepper  

 Ebeam4  

 E-Beam Lithography (EBL)  

 ICP 2  

 Spin-Rinse-Dry  

Retrieved from "https://web.ece.ucsb.edu/oewiki/index.php?title=Cleanroom_Equipment&oldid=3646"