Cleanroom Equipment
From OptoelectronicsWiki
- List of tools, manuals, links to NanoFab
- Bowers-specific processes
- Remarks, results, optimization runs
Ebeam4
- UCSB standard stepper frame
- Very smooth sidewall profile
- Great sidewall coverage if two directional rotation is used
- Tool notes
** Pumping down around 1 hr ** Use group source
