Process Hybrid Silicon
From OptoelectronicsWiki
Process ID | Version | Process flow | Process follower | Description |
---|---|---|---|---|
SP-PWD | WG.pptx | Si WG etch | Single etch-step SOI process; passive components | |
HSP-SOA | Hybrid silicon with SOAs | |||
HSP-MOD | Hybrid silicon with modulators | |||
HSP-DET | Hybrid silicon with detectors | |||
HSP-SOA-DET | Hybrid silicon with SOAs and detectors | |||
HSP-SOA-DET-MOD | Hybrid silicon with SOAs, detectors and modulators |