General Mask Info

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UCSB Stepper Frame

  • Standard UCSB stepper frame has a maximum open field of 16mm square.
  • In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
  • If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate


Mask Template Files

Number Description Mask file Instruction Date Created by Note
1 Template for 7.8mm square die with DFAS alignment marks 7.8mm square template instruction_7.8mm square APR 02, 2010 Hui-Wen  


Test structures

Test structures Ledit files
Number Description Mask file Instruction Date Created by Note
1 Passive Cut back 7.8mm square template instruction_7.8mm square APR 02, 2010 Hui-Wen