User contributions
From OptoelectronicsWiki
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- 08:43, 17 August 2012 (diff | hist) . . (0) . . DUV Stepper (→Characterization)
- 08:42, 17 August 2012 (diff | hist) . . (0) . . DUV Stepper (→Characterization)
- 08:41, 17 August 2012 (diff | hist) . . (+13) . . DUV Stepper (→Characterization)
- 08:40, 17 August 2012 (diff | hist) . . (+24) . . DUV Stepper (→Characterization)
- 12:03, 15 August 2012 (diff | hist) . . (+13) . . Cleanroom Equipment
- 12:02, 15 August 2012 (diff | hist) . . (-271) . . Cleanroom Equipment
- 11:57, 15 August 2012 (diff | hist) . . (+223) . . DUV Stepper
- 11:56, 15 August 2012 (diff | hist) . . (-21) . . Cleanroom Equipment (→DUV STEPPER)
- 11:55, 15 August 2012 (diff | hist) . . (0) . . DUV Stepper (→180C Bake)
- 11:55, 15 August 2012 (diff | hist) . . (-20) . . DUV Stepper (→180C Bake)
- 11:55, 15 August 2012 (diff | hist) . . (+25) . . DUV Stepper
- 11:54, 15 August 2012 (diff | hist) . . (0) . . m DUV Stepper (moved DUV Lithography Characterization to DUV Stepper)
- 11:54, 15 August 2012 (diff | hist) . . (+25) . . N DUV Lithography Characterization (moved DUV Lithography Characterization to DUV Stepper) (current)
- 11:53, 15 August 2012 (diff | hist) . . (-65) . . Cleanroom Equipment
- 11:53, 15 August 2012 (diff | hist) . . (+333) . . N Ebeam4 (Created page with "* Very smooth sidewall profile * Great sidewall coverage if two directional rotation is used * Tool notes ** Pumping down around 1 hr ** Use group source * Check [[media:100520_E...") (current)
- 11:53, 15 August 2012 (diff | hist) . . (-262) . . Cleanroom Equipment (→Ebeam4)
- 11:52, 15 August 2012 (diff | hist) . . (+38) . . Deep RIE Bosch Etcher (→Restart instructions) (current)
- 11:51, 15 August 2012 (diff | hist) . . (+598) . . N Deep RIE Bosch Etcher (Created page with "== Restart instructions == Note:You may have to wait for the temperature to stabilize between some of these steps. 1) Restart computer 2) Log in info (only required when resta...")
- 11:51, 15 August 2012 (diff | hist) . . (-582) . . Cleanroom Equipment
- 11:51, 15 August 2012 (diff | hist) . . (+39) . . Cleanroom Equipment
- 11:50, 15 August 2012 (diff | hist) . . (+1) . . Spin-Rinse-Dry (→Instructions) (current)
- 11:50, 15 August 2012 (diff | hist) . . (+48) . . Spin-Rinse-Dry (→Instructions)
- 11:49, 15 August 2012 (diff | hist) . . (+518) . . N Spin-Rinse-Dry (Created page with "== Instructions == 1) Load wafers facing the back of the chamber. 2) Press "Power" button. 3) Turn switch to "Hand". (Switch is located behind the tool) 4) Turn on water valv...")
- 11:49, 15 August 2012 (diff | hist) . . (-469) . . Cleanroom Equipment
- 14:19, 14 August 2012 (diff | hist) . . (-34) . . Cleanroom Equipment (→Ebeam4)
- 14:18, 14 August 2012 (diff | hist) . . (-7) . . Cleanroom Equipment (→DUV STEPPER - Bay 7)
- 14:04, 14 August 2012 (diff | hist) . . (-14) . . Cleanroom Equipment (→Spin-Rinse-Dry (SRD) - Bay 7)
- 14:02, 14 August 2012 (diff | hist) . . (+2) . . Cleanroom Equipment (→Spin-Rinse-Dry (SRD))
- 14:01, 14 August 2012 (diff | hist) . . (-1) . . Cleanroom Equipment (→DUV STEPPER - Bay #7)
- 14:01, 14 August 2012 (diff | hist) . . (+1) . . Cleanroom Equipment (→DUV STEPPER - Bay #7)
- 14:01, 14 August 2012 (diff | hist) . . (-3) . . Cleanroom Equipment (→Spin-Rinse-Dry (SRD))
- 14:00, 14 August 2012 (diff | hist) . . (+3) . . Cleanroom Equipment (→SRD)
- 14:00, 14 August 2012 (diff | hist) . . (-1) . . Cleanroom Equipment (→Spin-Rinse-Dry (SRD) - Bay #7)
- 13:58, 14 August 2012 (diff | hist) . . (+34) . . Cleanroom Equipment (→Ebeam4)
- 13:49, 14 August 2012 (diff | hist) . . (+544) . . Cleanroom Equipment
- 13:04, 14 August 2012 (diff | hist) . . (+11) . . DUV Stepper
- 13:04, 14 August 2012 (diff | hist) . . (+73) . . DUV Stepper
- 13:00, 14 August 2012 (diff | hist) . . (+1) . . Cleanroom Equipment (→DUV STEPPER)
- 12:59, 14 August 2012 (diff | hist) . . (0) . . m DUV Lithography Characterization Files (moved DUV Litho Test Characterization to DUV Lithography Characterization Files) (current)
- 12:59, 14 August 2012 (diff | hist) . . (+52) . . N DUV Litho Test Characterization (moved DUV Litho Test Characterization to DUV Lithography Characterization Files) (current)
- 12:58, 14 August 2012 (diff | hist) . . (+1) . . Cleanroom Equipment (→DUV STEPPER)
- 12:58, 14 August 2012 (diff | hist) . . (0) . . m DUV Stepper (moved DUV Litho Test Characterization to DUV Lithography Characterization)
- 12:58, 14 August 2012 (diff | hist) . . (+46) . . N DUV Lithography Characterization Files (moved DUV Litho Test Characterization to DUV Lithography Characterization)
- 12:57, 14 August 2012 (diff | hist) . . (0) . . Cleanroom Equipment (→DUV STEPPER)
- 12:56, 14 August 2012 (diff | hist) . . (-1) . . Cleanroom Equipment (→DUV STEPPER)
- 12:56, 14 August 2012 (diff | hist) . . (+1) . . Cleanroom Equipment (→DUV STEPPER)
- 12:56, 14 August 2012 (diff | hist) . . (+22) . . Cleanroom Equipment (→DUV STEPPER)
- 12:55, 14 August 2012 (diff | hist) . . (+31) . . DUV Stepper
- 12:53, 14 August 2012 (diff | hist) . . (+39) . . DUV Stepper
- 12:52, 14 August 2012 (diff | hist) . . (+15) . . DUV Stepper
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