SOI grating definition
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Revision as of 18:51, 27 October 2011 by 128.111.239.6 (Talk)
Contents
Current Processes
Sweeper Vertical Grating Coupler Process
Process Development Summary
Dose/Duty Cycle Analysis with Proximity Effect Observations
PPT
Future Untested Processes
Sweeper Two Etch Depth Grating Process (INCOMPLETE)
Standad EBL Spin,Bake, Exposure, Develop
Spin AZ4210 (4000rpm, 30sec) Pre-Exposure Bake (95C, 1min)
Lithography 30 GCA Stepper / Autostepper
Exposure: 3sec / 1sec (NEEDS CALIBRATION) Focus Offset: 0 (NEEDS CALIBRATION) NO POST-EXPOSURE BAKE Develop (AZ400K 1:4 diluted, 1min) DI Rinse
Partial deep grating etch
4210 strip in ISO
Shallow grating etch/Complete deep grating etch.
ZEP Strip (1165)
