DUV Stepper

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Media:DUV_Lithography_Test_on_Si.rar

160C Bake

SEMs - Dies 21-24: File:SEM Gratings 8 1 12.zip

Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip

170C Bake

SEMs - Dies 24-27: File:170c 8 4 12.zip

180C Bake

SEMs - Dies 19-28: File:180c 8 4 12.zip

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