Spin-Rinse-Dry

Instructions

1) Load wafers facing the back of the chamber.

2) Press "Power" button.

3) Turn switch to "Hand". (Switch is located behind the tool)

4) Turn on water valve so the handle is vertical and in line with the pipe. (Valve is located behind the tool)

5) Press "Start" button (Green button below the power button). Make sure you see water spraying.

6) Wait until dry cycle begins.

7) Turn switch back to "Auto".

8) Turn water valve off.

9) Remove samples when finished.

10) Press "Power" button.

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