Deep RIE Bosch Etcher

Restart instructions

Note:You may have to wait for the temperature to stabilize between some of these steps.

1) Restart computer

2) Log in info (only required when restarting) Username: 3333, Password: 3333

3) Click the "ON" button (in the bottom left)

4) Utilities->Turbo Pump ON

5) Click "Standby" button (again in bottom left)

6) Service->Maintenance->Pump->System (Turbo Pump)

7) Process->Batch...File->Load...Select a batch file to load, then close window

8) Click "Ready" button (again in bottom left)

9) Windows->Overview Diagram...and...You should be ready to go.