EPHI
From OptoelectronicsWiki
Overview
EPHI aims to integrate ultra low-loss waveguides (SiN/SiO2 on Si developed in IPHOD) and high-Q resonators with the hybrid Silicon platform to produce a low-noise oscillator.
Simulations
...
Processing
Dev2 (Hybrid Silicon only for SOA tests)
RUN 3.1 (active Silicon only for fast phase modulator tests)
Media:SWEEPER_3.1_Gratings.zip
Characterization
aSI PHASE MODULATOR RUN - Sweeper 3.1
Run 1
Step - Description - Sample Names - File
3.3 - Rib litho pics before hard mask etch: File:Rib litho pics.zip