Cleanroom Equipment
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Revision as of 12:33, 18 April 2013 by
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List of tools, manuals, links to NanoFab
Bowers-specific processes
Remarks, results, optimization runs
Tools
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AutoStep 200
Deep RIE Bosch Etcher
DUV Stepper
Ebeam4
E-Beam Lithography (EBL)
ICP 2
Spin-Rinse-Dry
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