Process Hybrid Silicon

Silicon process overview

Process ID	Version	Process flow	Process follower	Description
SP-PWD				Single etch-step SOI process; passive components
HSP-SOA			Hybrid silicon with SOAs
HSP-MOD			Hybrid silicon with modulators
HSP-DET			Hybrid silicon with detectors
HSP-SOA-DET			Hybrid silicon with SOAs and detectors
HSP-SOA-DET-MOD			Hybrid silicon with SOAs, detectors and modulators