Process Hybrid Silic

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Hybrid silica process overview
Process ID Version Process flow Process follower Description
ULLW-SOA-1300       Integration of actives operating at 1300um with silica waveguides using wafer bonding
ULLW-SOA-1550       Integration of actives operating at 1550um with silica waveguides using wafer bonding
HSP-ULLW-SOA       Integration of ULLWs on the hybrid silicon platform using inverse tapers
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