General Mask Info
From OptoelectronicsWiki
Revision as of 14:21, 21 April 2010 by 128.111.239.95 (Talk)
UCSB Stepper
- Standard UCSB stepper frame has a maximum open field of 16mm square.
- In general, if you die size is smaller than 7.8mm sqaure, you can fit four layers of mask into one mask plate.
- If the die size is larger than 7.8mm square, please find the best way by yourself to maximize the use of the mask plate.
- After you finish your mask, please reference "mask order" to prepare the mask files to the vendors.
Mask Template Files
Number | Description | Mask file | Instruction | Date | Created by | Note |
---|---|---|---|---|---|---|
1 | Template for 7.8mm square die with DFAS alignment marks | 7.8mm square template | file | APR 02, 2010 | Hui-Wen |
Test structures
- Please contribute common test structures that you think might be useful to everyone.
Number | Description | Mask file | Instruction | Date | Created by | Note |
---|---|---|---|---|---|---|
1 | Passive Cut back | Passive WG spiral | APR 02, 2010 | Hui-Wen |
Number | Description | Mask file | Instruction | Date | Created by | Note |
---|---|---|---|---|---|---|
1 | Passive Cut back | Passive WG spiral | APR 02, 2010 | Hui-Wen |