Cleanroom Equipment

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  • List of tools, manuals, links to NanoFab
  • Bowers-specific processes
  • Remarks, results, optimization runs

Ebeam4

  • Very smooth sidewall profile
  • Great sidewall coverage if two directional rotation is used
  • Tool notes
    • Pumping down around 1 hr
    • Use group source
  • Check Deposit Report for images using two different orientation for deposition
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