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• 12:13, 24 July 2012 JKD (Talk | contribs) uploaded a new version of "File:SWEEPER Actives Trav v21 2 ACTIVE SI ONLY.docx" (- Blanks filled in for SU8, nitride etches - heavy ion implant moved to end to avoid exceeding thermal budget - SU8/nitride to be opened for gratings, heavy ion, during VIA2 (probe via) litho, then oxide/nitride protection layers opened during GO (grating)
• 09:54, 24 July 2012 JKD (Talk | contribs) uploaded "File:SWEEPER Actives Trav v21 2 ACTIVE SI ONLY.docx" (- Blanks filled in for SU8, nitride etches - heavy ion implant moved to end to avoid exceeding thermal budget - SU8/nitride to be opened for gratings, heavy ion, during VIA2 (probe via) litho, then oxide/nitride protection layers opened during GO (grating)