Deep RIE Bosch Etcher
From OptoelectronicsWiki
Restart instructions
Note:You may have to wait for the temperature to stabilize between some of these steps.
1) Restart computer
2) Log in info (only required when restarting) Username: 3333, Password: 3333
3) Click the "ON" button (in the bottom left)
4) Utilities->Turbo Pump ON
5) Click "Standby" button (again in bottom left)
6) Service->Maintenance->Pump->System (Turbo Pump)
7) Process->Batch...File->Load...Select a batch file to load, then close window
8) Click "Ready" button (again in bottom left)
9) Windows->Overview Diagram...and...You should be ready to go.
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